Nanoscale Solid State Batteries Enabled by Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte

Pearse, Alexander J.; Schmitt, Thomas E.; Fuller, Elliot J.; El-Gabaly, Farid; Lin, Chuan-Fu; Gerasopoulos, Konstantinos; Kozen, Alexander C.; Talin, A. Alec; Rubloff, Gary; Gregorczyk, Keith E.

doi:10.1021/acs.chemmater.7b00805

Nanoscale Solid State Batteries Enabled by Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte

Journal Article · Mon Apr 10 00:00:00 EDT 2017 · Chemistry of Materials

DOI:https://doi.org/10.1021/acs.chemmater.7b00805· OSTI ID:1360797

^[1]; Schmitt, Thomas E. ^[1]; Fuller, Elliot J. ^[2]; El-Gabaly, Farid ^[2]; Lin, Chuan-Fu ^[1]; Gerasopoulos, Konstantinos ^[3]; Kozen, Alexander C. ^[4]; ^[2]; Rubloff, Gary ^[1]; Gregorczyk, Keith E. ^[1]

Univ. of Maryland, College Park, MD (United States). Dept. of Materials Science and Engineering
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Johns Hopkins Univ., Laurel, MD (United States). Applied Physics Lab., Dept. of Research and Exploratory Development
American Society for Engineering Education, Washington, DC (United States)

Several active areas of research in novel energy storage technologies, including three-dimensional solid state batteries and passivation coatings for reactive battery electrode components, require conformal solid state electrolytes. We describe an atomic layer deposition (ALD) process for a member of the lithium phosphorus oxynitride (LiPON) family, which is employed as a thin film lithium-conducting solid electrolyte. The reaction between lithium tert-butoxide (LiO^tBu) and diethyl phosphoramidate (DEPA) produces conformal, ionically conductive thin films with a stoichiometry close to Li₂PO₂N between 250 and 300°C. The P/N ratio of the films is always 1, indicative of a particular polymorph of LiPON which closely resembles a polyphosphazene. Films grown at 300°C have an ionic conductivity of (6.51 ± 0.36)×10^-7 S/cm at 35°C, and are functionally electrochemically stable in the window from 0 to 5.3V vs. Li/Li⁺. We demonstrate the viability of the ALD-grown electrolyte by integrating it into full solid state batteries, including thin film devices using LiCoO₂ as the cathode and Si as the anode operating at up to 1 mA/cm². The high quality of the ALD growth process allows pinhole-free deposition even on rough crystalline surfaces, and we demonstrate the fabrication and operation of thin film batteries with the thinnest (<40nm) solid state electrolytes yet reported. Finally, we show an additional application of the moderate-temperature ALD process by demonstrating a flexible solid state battery fabricated on a polymer substrate.

View Accepted Manuscript (DOE)

Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES); Sandia National Laboratories (SNL-CA), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC04-94AL85000; SC0001160

OSTI ID:: 1360797

Report Number(s):: SAND--2017-2069J; 651195

Journal Information:: Chemistry of Materials, Journal Name: Chemistry of Materials Journal Issue: 8 Vol. 29; ISSN 0897-4756

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

References (63)

Spectroscopic Ellipsometry Fujiwara, Hiroyuki https://doi.org/10.1002/9780470060193	book	January 2007
High-Performance All-Solid-State Cells Fabricated With Silicon Electrodes Phan, Viet Phong; Pecquenard, Brigitte; Le Cras, Frédéric Advanced Functional Materials, Vol. 22, Issue 12 https://doi.org/10.1002/adfm.201200104	journal	March 2012
Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li-Ion Batteries Jung, Yoon Seok; Cavanagh, Andrew S.; Riley, Leah A. Advanced Materials, Vol. 22, Issue 19 https://doi.org/10.1002/adma.200903951	journal	April 2010
All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts Oudenhoven, Jos F. M.; Baggetto, Loïc.; Notten, Peter H. L. Advanced Energy Materials, Vol. 1, Issue 1 https://doi.org/10.1002/aenm.201000002	journal	November 2010
All-Solid-State Lithium-Ion Microbatteries Using Silicon Nanofilm Anodes: High Performance and Memory Effect Cras, Frédéric Le; Pecquenard, Brigitte; Dubois, Vincent Advanced Energy Materials, Vol. 5, Issue 19 https://doi.org/10.1002/aenm.201501061	journal	July 2015
Lithium-Ion Batteries: Solid Electrolyte: the Key for High-Voltage Lithium Batteries (Adv. Energy Mater. 4/2015) Li, Juchuan; Ma, Cheng; Chi, Miaofang Advanced Energy Materials, Vol. 5, Issue 4 https://doi.org/10.1002/aenm.201570018	journal	February 2015
Atomic Layer Deposition of Li _x Al _y S Solid-State Electrolytes for Stabilizing Lithium-Metal Anodes Cao, Yanqiang; Meng, Xiangbo; Elam, Jeffrey W. ChemElectroChem, Vol. 3, Issue 6 https://doi.org/10.1002/celc.201600139	journal	April 2016
Spectroscopic ellipsometry and optical transmission study of LiPON thin films prepared by RF sputtering: Spectroscopic ellipsometry and optical transmission study of LiPON thin films Su, Yurong; Zhang, Jia; Shokhovets, Sviatoslav physica status solidi (b), Vol. 254, Issue 4 https://doi.org/10.1002/pssb.201600424	journal	October 2016
Aqueous and nonaqueous lithium-air batteries enabled by water-stable lithium metal electrodes Visco, Steven J.; Nimon, Vitaliy Y.; Petrov, Alexei Journal of Solid State Electrochemistry https://doi.org/10.1007/s10008-014-2427-x	journal	March 2014
Phosphate structure and lithium environments in lithium phosphorus oxynitride amorphous thin films Carrillo Solano, M. A.; Dussauze, M.; Vinatier, P. Ionics, Vol. 22, Issue 4 https://doi.org/10.1007/s11581-015-1573-1	journal	October 2015
An examination of the surface decomposition chemistry of lithium niobate precursors under high vacuum conditions Saulys, D.; Joshkin, V.; Khoudiakov, M. Journal of Crystal Growth, Vol. 217, Issue 3 https://doi.org/10.1016/S0022-0248(00)00412-7	journal	August 2000
Analysis of thin-film lithium batteries with cathodes of 50 nm to 4 μm thick LiCoO2 Dudney, Nancy J.; Jang, Young-Il Journal of Power Sources, Vol. 119-121 https://doi.org/10.1016/S0378-7753(03)00162-9	journal	June 2003
An all-solid state NASICON sodium battery operating at 200 °C Lalère, F.; Leriche, J. B.; Courty, M. Journal of Power Sources, Vol. 247 https://doi.org/10.1016/j.jpowsour.2013.09.051	journal	February 2014
A rocking chair type all-solid-state lithium ion battery adopting Li2O–ZrO2 coated LiNi0.8Co0.15Al0.05O2 and a sulfide based electrolyte Ito, Seitaro; Fujiki, Satoshi; Yamada, Takanobu Journal of Power Sources, Vol. 248 https://doi.org/10.1016/j.jpowsour.2013.10.005	journal	February 2014
Preparation and electrochemical performance of polyphosphazene based salt-in-polymer electrolyte membranes for lithium ion batteries Jankowsky, S.; Hiller, M. M.; Wiemhöfer, H. -D. Journal of Power Sources, Vol. 253 https://doi.org/10.1016/j.jpowsour.2013.11.120	journal	May 2014
Ultra-thin LiPON films – Fundamental properties and application in solid state thin film model batteries Nowak, Susann; Berkemeier, Frank; Schmitz, Guido Journal of Power Sources, Vol. 275 https://doi.org/10.1016/j.jpowsour.2014.10.202	journal	February 2015
Reduction of charge-transfer resistance at the solid electrolyte – electrode interface by pulsed laser deposition of films from a crystalline Li2PO2N source West, William C.; Hood, Zachary D.; Adhikari, Shiba P. Journal of Power Sources, Vol. 312 https://doi.org/10.1016/j.jpowsour.2016.02.034	journal	April 2016
Solid-state thin-film rechargeable batteries Dudney, N.J. Materials Science and Engineering: B, Vol. 116, Issue 3, p. 245-249 https://doi.org/10.1016/j.mseb.2004.05.045	journal	February 2005
On the physical interpretation of constant phase elements Shoar Abouzari, M. R.; Berkemeier, F.; Schmitz, G. Solid State Ionics, Vol. 180, Issue 14-16 https://doi.org/10.1016/j.ssi.2009.04.002	journal	June 2009
Finite element modelling of ion transport in the electrolyte of a 3D-microbattery Zadin, Vahur; Brandell, Daniel; Kasemägi, Heiki Solid State Ionics, Vol. 192, Issue 1 https://doi.org/10.1016/j.ssi.2010.02.007	journal	June 2011
Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance Fleutot, B.; Pecquenard, B.; Martinez, H. Solid State Ionics, Vol. 186, Issue 1 https://doi.org/10.1016/j.ssi.2011.01.006	journal	March 2011
A new crystalline LiPON electrolyte: Synthesis, properties, and electronic structure Senevirathne, Keerthi; Day, Cynthia S.; Gross, Michael D. Solid State Ionics, Vol. 233 https://doi.org/10.1016/j.ssi.2012.12.013	journal	February 2013
Lipon thin films grown by plasma-enhanced metalorganic chemical vapor deposition in a N2–H2–Ar gas mixture Meda, Lamartine; Maxie, Eleston E. Thin Solid Films, Vol. 520, Issue 6 https://doi.org/10.1016/j.tsf.2011.08.091	journal	January 2012
Atomic Layer Deposition of the Solid Electrolyte LiPON Kozen, Alexander C.; Pearse, Alexander J.; Lin, Chuan-Fu Chemistry of Materials, Vol. 27, Issue 15 https://doi.org/10.1021/acs.chemmater.5b01654	journal	July 2015
Atomic Layer Deposition of Lithium Phosphorus Oxynitride Nisula, Mikko; Shindo, Yohei; Koga, Hideyuki Chemistry of Materials, Vol. 27, Issue 20 https://doi.org/10.1021/acs.chemmater.5b02199	journal	October 2015
Inorganic Solid-State Electrolytes for Lithium Batteries: Mechanisms and Properties Governing Ion Conduction Bachman, John Christopher; Muy, Sokseiha; Grimaud, Alexis Chemical Reviews, Vol. 116, Issue 1 https://doi.org/10.1021/acs.chemrev.5b00563	journal	December 2015
Origin of Outstanding Stability in the Lithium Solid Electrolyte Materials: Insights from Thermodynamic Analyses Based on First-Principles Calculations Zhu, Yizhou; He, Xingfeng; Mo, Yifei ACS Applied Materials & Interfaces, Vol. 7, Issue 42 https://doi.org/10.1021/acsami.5b07517	journal	October 2015
Electrical Characterization of Ultrathin RF-Sputtered LiPON Layers for Nanoscale Batteries Put, Brecht; Vereecken, Philippe M.; Meersschaut, Johan ACS Applied Materials & Interfaces, Vol. 8, Issue 11 https://doi.org/10.1021/acsami.5b12500	journal	March 2016
Fabrication, Testing, and Simulation of All-Solid-State Three-Dimensional Li-Ion Batteries Talin, A. Alec; Ruzmetov, Dmitry; Kolmakov, Andrei ACS Applied Materials & Interfaces, Vol. 8, Issue 47 https://doi.org/10.1021/acsami.6b12244	journal	November 2016
Artificial Solid Electrolyte Interphase To Address the Electrochemical Degradation of Silicon Electrodes Li, Juchuan; Dudney, Nancy J.; Nanda, Jagjit ACS Applied Materials & Interfaces, Vol. 6, Issue 13 https://doi.org/10.1021/am5009419	journal	June 2014
Polyphosphazene electrolytes for lithium batteries Nazri, Gholamabbas; MacArthur, Donald M.; Ogara, John F. Chemistry of Materials, Vol. 1, Issue 3 https://doi.org/10.1021/cm00003a019	journal	May 1989
Atomic Layer Deposition of Li ₂ O–Al ₂ O ₃ Thin Films Aaltonen, Titta; Nilsen, Ola; Magrasó, Anna Chemistry of Materials, Vol. 23, Issue 21 https://doi.org/10.1021/cm200899k	journal	November 2011
Lithium Lanthanum Titanium Oxides: A Fast Ionic Conductive Coating for Lithium-Ion Battery Cathodes Qian, Danna; Xu, Bo; Cho, Hyung-Man Chemistry of Materials, Vol. 24, Issue 14 https://doi.org/10.1021/cm300929r	journal	July 2012
Highly Conductive and Conformal Poly(3,4-ethylenedioxythiophene) (PEDOT) Thin Films via Oxidative Molecular Layer Deposition Atanasov, Sarah E.; Losego, Mark D.; Gong, Bo Chemistry of Materials, Vol. 26, Issue 11 https://doi.org/10.1021/cm500825b	journal	June 2014
Three-Dimensional Battery Architectures Long, Jeffrey W.; Dunn, Bruce; Rolison, Debra R. Chemical Reviews, Vol. 104, Issue 10, p. 4463-4492 https://doi.org/10.1021/cr020740l	journal	October 2004
Atomic Layer Deposition: An Overview George, Steven M. Chemical Reviews, Vol. 110, Issue 1, p. 111-131 https://doi.org/10.1021/cr900056b	journal	January 2010
The Formation of P-N and P-N-P Bonds by Elimination of Phenol in a Basic Condensation Nielsen, Morris L. Inorganic Chemistry, Vol. 3, Issue 12 https://doi.org/10.1021/ic50022a024	journal	December 1964
Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes Liu, Jian; Banis, Mohammad N.; Li, Xifei The Journal of Physical Chemistry C, Vol. 117, Issue 39 https://doi.org/10.1021/jp4063302	journal	September 2013
Atomic Layer Deposition and in Situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide Kozen, Alexander C.; Pearse, Alexander J.; Lin, Chuan-Fu The Journal of Physical Chemistry C, Vol. 118, Issue 48 https://doi.org/10.1021/jp509298r	journal	November 2014
Electrolyte Stability Determines Scaling Limits for Solid-State 3D Li Ion Batteries Ruzmetov, Dmitry; Oleshko, Vladimir P.; Haney, Paul M. Nano Letters, Vol. 12, Issue 1 https://doi.org/10.1021/nl204047z	journal	December 2011
A solid future for battery development Janek, Jürgen; Zeier, Wolfgang G. Nature Energy, Vol. 1, Issue 9 https://doi.org/10.1038/nenergy.2016.141	journal	September 2016
High-power all-solid-state batteries using sulfide superionic conductors Kato, Yuki; Hori, Satoshi; Saito, Toshiya Nature Energy, Vol. 1, Issue 4 https://doi.org/10.1038/nenergy.2016.30	journal	March 2016
An all-in-one nanopore battery array Liu, Chanyuan; Gillette, Eleanor I.; Chen, Xinyi Nature Nanotechnology, Vol. 9, Issue 12 https://doi.org/10.1038/nnano.2014.247	journal	November 2014
Synthesis of ion conducting Li _x Al _y Si _z O thin films by atomic layer deposition Perng, Ya-Chuan; Cho, Jea; Sun, Steven Y. J. Mater. Chem. A, Vol. 2, Issue 25 https://doi.org/10.1039/C3TA14928E	journal	January 2014
Atomic layer deposition of ferroelectric LiNbO ₃ Østreng, Erik; Sønsteby, Henrik H.; Sajavaara, Timo J. Mater. Chem. C, Vol. 1, Issue 27 https://doi.org/10.1039/C3TC30271G	journal	January 2013
The origin of high electrolyte–electrode interfacial resistances in lithium cells containing garnet type solid electrolytes Cheng, Lei; Crumlin, Ethan J.; Chen, Wei Phys. Chem. Chem. Phys., Vol. 16, Issue 34 https://doi.org/10.1039/C4CP02921F	journal	January 2014
The pursuit of solid-state electrolytes for lithium batteries: from comprehensive insight to emerging horizons Chen, Renjie; Qu, Wenjie; Guo, Xing Materials Horizons, Vol. 3, Issue 6 https://doi.org/10.1039/C6MH00218H	journal	January 2016
Side-chain poly(phosphoramidate)s via acyclic diene metathesis polycondensation Cankaya, Alper; Steinmann, Mark; Bülbül, Yagmur Polymer Chemistry, Vol. 7, Issue 31 https://doi.org/10.1039/C6PY00999A	journal	January 2016
Lanthanum titanate and lithium lanthanum titanate thin films grown by atomic layer deposition Aaltonen, Titta; Alnes, Mari; Nilsen, Ola Journal of Materials Chemistry, Vol. 20, Issue 14 https://doi.org/10.1039/b923490j	journal	January 2010
Cathodic ALD V2O5 thin films for high-rate electrochemical energy storage Chen, Xinyi; Pomerantseva, Ekaterina; Gregorczyk, Keith RSC Advances, Vol. 3, Issue 13 https://doi.org/10.1039/c3ra23031g	journal	January 2013
In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition Langereis, E.; Heil, S. B. S.; Knoops, H. C. M. Journal of Physics D: Applied Physics, Vol. 42, Issue 7 https://doi.org/10.1088/0022-3727/42/7/073001	journal	March 2009
Elegant design of electrode and electrode/electrolyte interface in lithium-ion batteries by atomic layer deposition Liu, Jian; Sun, Xueliang Nanotechnology, Vol. 26, Issue 2 https://doi.org/10.1088/0957-4484/26/2/024001	journal	December 2014
First-principles study of LiPON and related solid electrolytes Du, Yaojun A.; Holzwarth, N. A. W. Physical Review B, Vol. 81, Issue 18 https://doi.org/10.1103/PhysRevB.81.184106	journal	May 2010
Plasma - Assisted ALD of Lipo(N) for Solid State Batteries Put, Brecht; Mees, Maarten J.; Hornsveld, Norah ECS Transactions, Vol. 75, Issue 20 https://doi.org/10.1149/07520.0061ecst	journal	January 2017
High-Voltage Cycling Behavior of Thin-Film LiCoO[sub 2] Cathodes Jang, Young-Il; Dudney, Nancy J.; Blom, Douglas A. Journal of The Electrochemical Society, Vol. 149, Issue 11 https://doi.org/10.1149/1.1511751	journal	January 2002
A Stable Thin-Film Lithium Electrolyte: Lithium Phosphorus Oxynitride Yu, Xiaohua; Bates, J. B.; Jellison, G. E. Journal of The Electrochemical Society, Vol. 144, Issue 2, p. 524-532 https://doi.org/10.1149/1.1837443	journal	January 1997
Characterization of Thin-Film Lithium Batteries with Stable Thin-Film Li[sub 3]PO[sub 4] Solid Electrolytes Fabricated by ArF Excimer Laser Deposition Kuwata, Naoaki; Iwagami, Naoya; Tanji, Yoshinari Journal of The Electrochemical Society, Vol. 157, Issue 4 https://doi.org/10.1149/1.3306339	journal	January 2010
Fabrication of Nanoporous Pt by Electrochemical Alloying and Dealloying with Li Nishio, K.; Yoshida, M.; Masuda, H. ECS Electrochemistry Letters, Vol. 2, Issue 11 https://doi.org/10.1149/2.007311eel	journal	January 2013
Thermal Atomic Layer Deposition of Lithium Phosphorus Oxynitride as a Thin-Film Solid Electrolyte Shibata, Satoshi Journal of The Electrochemical Society, Vol. 163, Issue 13 https://doi.org/10.1149/2.0371613jes	journal	January 2016
Stability of Thin-Film Lithium-Ion Rechargeable Batteries Fabricated by Sputtering Method without Heating Nakazawa, Hiromi; Sano, Kimihiro; Baba, Mamoru Journal of The Electrochemical Society, Vol. 162, Issue 3 https://doi.org/10.1149/2.0491503jes	journal	December 2014
Lithium Phosphate Thin Films Grown by Atomic Layer Deposition Hämäläinen, Jani; Holopainen, Jani; Munnik, Frans Journal of The Electrochemical Society, Vol. 159, Issue 3 https://doi.org/10.1149/2.052203jes	journal	January 2012
Thin film Li electrolytes for all-solid-state micro-batteries Xia, Hui; Wang, Hai Long; Xiao, Wei International Journal of Surface Science and Engineering, Vol. 3, Issue 1/2 https://doi.org/10.1504/IJSURFSE.2009.024360	journal	January 2009
Organic and inorganic–organic thin film structures by molecular layer deposition: A review Sundberg, Pia; Karppinen, Maarit Beilstein Journal of Nanotechnology, Vol. 5 https://doi.org/10.3762/bjnano.5.123	journal	January 2014

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