Formation of Pd nanocrystals in titanium-oxide film by rapid thermal annealing of reactively cosputtered TiPdO films

Journal Article · Tue Mar 15 04:00:00 EDT 2011 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3549112· OSTI ID:22051167

Wanyi, Huang; Shijin, Ding; Hongbing, Chen; Qingqing, Sun; Zhang, David Wei ^[1]

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1. State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433 (China)

In this article, the authors report a novel method for preparation of Pd nanocrystals embedded in TiO{sub 2} film; i.e., the TiPdO films are first deposited by reactively cosputtering Ti and Pd targets in a plasma mixture of O{sub 2} and Ar, followed by rapid thermal annealing (RTA). The experimental results indicate that the TiPdO film with a high content of Pd is inclined to produce big nanocrystals. Furthermore, the higher the RTA temperature, the bigger the Pd nanocrystals become. In addition, our analyses of the x-ray photoelectron spectroscopy spectra reveal that PdO, PdO{sub 2}, Ti{sub 2}O{sub 3}, and TiO{sub 2} coexist in the as-deposited film, and the RTA at 600 deg. C leads to decomposition of the entire PdO{sub 2} and partial PdO, together with the growth of Pd nanocrystals. At the same time, the released oxygen oxidizes fully Ti{sub 2}O{sub 3} into TiO{sub 2} during the decomposition. As the RTA temperature is increased up to 900 deg. C, more and more PdO is decomposed and the Pd nanocrystals become bigger and bigger.

• OSTI ID: 22051167
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 2 Vol. 29; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
77 NANOSCIENCE AND NANOTECHNOLOGY
ANNEALING
ARGON
CRYSTAL GROWTH
DEPOSITION
NANOSTRUCTURES
OXYGEN
PALLADIUM
PALLADIUM OXIDES
PLASMA
SPUTTERING
THIN FILMS
TITANIUM OXIDES
X-RAY PHOTOELECTRON SPECTROSCOPY