Composition and structure of Pd nanoclusters in SiO{sub x} thin film

Journal Article · Fri Apr 15 04:00:00 EDT 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3561492· OSTI ID:21560187

Thoegersen, A; Mayandi, J; Vines, L ^[1]; Sunding, M F; Olsen, A ^[2]; Diplas, S ^[3]; Mitome, M; Bando, Y ^[4]

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1. Centre for Materials Science and Nanotechnology, University of Oslo, P.O. Box 1126 Blindern, N-0318 Oslo (Norway)
2. Department of Physics, University of Oslo, P.O. Box 1048 Blindern, N-0316 Oslo (Norway)
3. SINTEF Materials and Chemistry, P.O. Box 124 Blindern, N-0314 Oslo, Norway and Centre for Material Science and Nanotechnology, University of Oslo, 0314 Oslo (Norway)
4. National Institute of Material Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044 (Japan)

The nucleation, distribution, composition, and structure of Pd nanocrystals in SiO{sub 2} multilayers containing Ge, Si, and Pd are studied using high resolution transmission electron microscopy (HRTEM) and x-ray photoelectron spectroscopy (XPS), before and after heat treatment. The Pd nanocrystals in the as deposited sample (sample ASD) seem to be capped by a layer of PdO{sub x}. A 1-2 eV shift in binding energy was found for the Pd-3d XPS peak, due to initial state Pd to O charge transfer in this layer. The heat treatment results in a decomposition of PdO and Pd into pure Pd nanocrystals and SiO{sub x}.

• OSTI ID: 21560187
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 109; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ATOMIC CLUSTERS
BINDING ENERGY
CHALCOGENIDES
CHEMICAL REACTIONS
DECOMPOSITION
DISTRIBUTION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
ENERGY
FILMS
GERMANIUM
HEAT TREATMENTS
LAYERS
METALS
MICROSCOPY
NANOSTRUCTURES
NUCLEATION
OXIDES
OXYGEN COMPOUNDS
PALLADIUM
PALLADIUM COMPOUNDS
PALLADIUM OXIDES
PHOTOELECTRON SPECTROSCOPY
PLATINUM METALS
PYROLYSIS
RESOLUTION
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SPECTROSCOPY
THERMOCHEMICAL PROCESSES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY PHOTOELECTRON SPECTROSCOPY