Combined single-crystalline and polycrystalline CVD diamond substrates for diamond electronics
- Russian Academy of Sciences, Institute of Applied Physics (Russian Federation)
- 'Istok' Scientific and Industrial Enterprise (Russian Federation)
The fabrication of diamond substrates in which single-crystalline and polycrystalline CVD diamond form a single wafer, and the epitaxial growth of diamond films on such combined substrates containing polycrystalline and (100) single-crystalline CVD diamond regions are studied.
- OSTI ID:
- 22039030
- Journal Information:
- Semiconductors, Journal Name: Semiconductors Journal Issue: 2 Vol. 46; ISSN SMICES; ISSN 1063-7826
- Country of Publication:
- United States
- Language:
- English
Similar Records
Nucleation and growth of CVD diamond films on patterned substrates
Polycrystalline CVD diamond films with high electrical mobility
CVD diamond deposition processes investigation: Cars diagnostics/modeling
Journal Article
·
Thu Dec 19 23:00:00 EST 2002
· Diamond and Related Materials
·
OSTI ID:823742
Polycrystalline CVD diamond films with high electrical mobility
Journal Article
·
Fri May 28 00:00:00 EDT 1993
· Science (Washington, D.C.); (United States)
·
OSTI ID:6467650
CVD diamond deposition processes investigation: Cars diagnostics/modeling
Journal Article
·
Wed Oct 31 23:00:00 EST 1990
· Journal of Materials Research; (USA)
·
OSTI ID:6289636