CVD diamond deposition processes investigation: Cars diagnostics/modeling

Journal Article · Thu Nov 01 04:00:00 EST 1990 · Journal of Materials Research; (USA)

DOI:https://doi.org/10.1557/JMR.1990.2387· OSTI ID:6289636

Hay, S O; Roman, W C; Colket, III, M B ^[1]

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1. United Technologies Research Center, East Hartford, Connecticut 06108 (USA)

The driving force behind the strong interest in diamond deposition processes is the outstanding combination of unique natural properties of this material. A wide variety of techniques has been employed to generate diamond coatings including hot filament, thermal plasma, CVD, PACVD (rf, dc, and microwave), low energy carbon ion beam, laser beam, oxyacetylene torch, and numerous hybrid dual-beam configurations. Thus, there are many routes available for producing diamond coatings in the form of small individual crystals, amorphous coatings, polycrystalline films or single crystal films under conditions far removed from the thermodynamically stable region nominally associated with diamond growth. CVD of diamond coatings from hydrocarbon containing gases can have an almost infinite number of compositions and structures; each with differing amounts of sp{sup 3} (diamond) and sp{sup 2} (graphite) bonding. This variation has contributed to confusion both in the working definition of diamond coatings and in understanding the controlling processes of forming these films. In fact, the mechanisms involved in the gas phase processes, the nucleation and growth structures, and especially their correlation are poorly understood.

• OSTI ID: 6289636
• Journal Information: Journal of Materials Research; (USA), Journal Name: Journal of Materials Research; (USA) Vol. 5:11; ISSN JMREE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ALKANES
CARBON
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIAGNOSTIC TECHNIQUES
DIAMONDS
DISPERSIONS
ELEMENTAL MINERALS
ELEMENTS
ENERGY LEVELS
EXCITED STATES
FILAMENTS
FLUID FLOW
FLUIDS
GAS FLOW
GASES
HYDROCARBONS
HYDROGEN
LASER SPECTROSCOPY
LOW PRESSURE
METHANE
MINERALS
MIXTURES
MORPHOLOGY
NONMETALS
ORGANIC COMPOUNDS
PARTIAL PRESSURE
PLASMA
RAMAN SPECTROSCOPY
RF SYSTEMS
ROTATIONAL STATES
SPECTROSCOPY
SURFACE COATING
TEMPERATURE MEASUREMENT