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Properties of the SiO{sub 2}- and SiN{sub x}-capped GaAs(100) surfaces of GaInAsN/GaAs quantum-well heterostructures studied by photoelectron spectroscopy and photoluminescence

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3634046· OSTI ID:22027736
 [1]; ; ;  [2];  [1]
  1. Department of Physics and Astronomy, University of Turku, Turku FI-20014 (Finland)
  2. Optoelectronics Research Centre, Tampere University of Technology, Tampere FI-33101 (Finland)
SiO{sub 2} and SiN{sub x} layers are routinely deposited onto III-V(100) surfaces at different device processing steps. We elucidate these insulator-interface properties with photoemission and photoluminescence (PL) of SiO{sub 2}- and SiN{sub x}-capped GaAs(100) surfaces of GaInAsN/GaAs quantum wells (QWs). Post-growth annealing led to an increase of the QW-PL intensity, of which origin can be clearly linked to the SiO{sub 2} and SiN{sub x} interfaces. Concomitantly, Ga{sub 2}O-related photoemission increased, indicating useful formation of Ga{sub 2}O at both insulator interfaces. Furthermore, higher Ga-oxidation-state emission, identified with Ga diffused into SiO{sub 2} and SiN{sub x}, correlates with the blue-shift of the QW-PL wavelength. Also, interfacial As-As related photoemission was identified.
OSTI ID:
22027736
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 10 Vol. 99; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English