A multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV

Journal Article · Thu May 17 00:00:00 EDT 2012 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3703337· OSTI ID:22004041

Imazono, T; Koike, M; Koeda, M; Nagano, T; Sasai, H; Oue, Y; Yonezawa, Z; Kuramoto, S; Terauchi, M; Takahashi, H; Handa, N; Murano, T ^[1]

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1. QuBS, Japan Atomic Energy Agency (JAEA), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215 (Japan)

A multilayer mirror with a novel layer structure to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence is invented and applied to a multilayer grating for use in a flat-field spectrograph attached to a conventional electron microscope. The diffraction efficiency of the fabricated multilayer grating having the new layer structure is evaluated at the angle of incidence of 88.65 deg. in the energy region of 2.1-4.0 keV. It is shown that the multilayer grating is effective to uniformly enhance the diffraction efficiency and able to be practically used in this energy region.

• OSTI ID: 22004041
• Journal Information: AIP Conference Proceedings, Vol. 1437, Issue 1; Conference: 21. international congress on X-ray optics and microanalysis, Campinas (Brazil), 5-9 Sep 2011; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
47 OTHER INSTRUMENTATION
DIFFRACTION
DIFFRACTION GRATINGS
EFFICIENCY
ELECTRON MICROSCOPES
INCIDENCE ANGLE
KEV RANGE
LAYERS
MIRRORS
REFLECTIVITY
SPECTROMETERS
TRANSMISSION ELECTRON MICROSCOPY