Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region
W/C and Co/SiO2 multilayer gratings have been fabricated by depositing a multilayer coating on the surface of laminar-type holographic master gratings. The diffraction efficiency was measured by reflectometers in the energy region of 0.6-8.0 keV at synchrotron radiation facilities as well as with an x-ray diffractometer at 8.05 keV. The Co/SiO2 and W/C multilayer gratings showed peak diffraction efficiencies of 0.47 and 0.38 at 6.0 and 8.0 keV, respectively. To our knowledge, the peak efficiency of the W/C multilayer grating is the highest measured with hard x rays. The diffraction efficiency of the Co/SiO2 multilayer gratings was higher than that of the W/C multilayer grating in the energy range of 2.5-6.0 keV. However, it decreased significantly in the energy above the K absorption edge of Co(7.71 keV). For the Co/SiO2 multilayer grating, the measured diffraction efficiencies agreed with the calculated curves assuming a rms roughness of?1 nm.
- OSTI ID:
- 20853566
- Journal Information:
- Applied Optics, Journal Name: Applied Optics Journal Issue: 26 Vol. 45; ISSN 0003-6935; ISSN APOPAI
- Country of Publication:
- United States
- Language:
- English
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