Evaluation of Carbon Interstitial in C-ion Implanted ZnO Bulk Single Crystals by a Nuclear Reaction Analysis Study: An Origin of Low Resistivity

Journal Article · Fri Dec 23 04:00:00 EST 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3666261· OSTI ID:21612433

Izawa, Y; Matsumoto, K; Oga, T; Kuriyama, K ^[1]; Kushida, K ^[2]; Kinomura, A ^[3]

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1. College of Engineering and Research Center of Ion Beam Technology, Hosei University, Koganei, Tokyo 184-8584 (Japan)
2. Department of Arts and Sciences, Osaka Kyoiku University, Kashiwara, Osaka 582-8582 (Japan)
3. National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568 (Japan)

Nuclear reaction analysis (NRA) of carbon-implanted ZnO bulk single crystals (carbon concentration: 1.5x10{sup 20} cm{sup -3}), in conjunction with the channeling technique, using the {sup 12}C(d,p){sup 13}C and {sup 16}O(d,p){sup 17}O reactions shows the presence of the interstitial carbon (C{sub i}) and the occupancy of substitute sites of oxygen atoms. These results suggest that the variation in resistivity from the order of 10{sup 4} {Omega}cm(for un-implanted samples) to that of 10 {Omega}cm (for as-implanted ones) is attributed to the C{sub i} and/or its complex defects, which would act as a shallow donor in ZnO.

• OSTI ID: 21612433
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1399; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CARBON
CARBON 12
CARBON 13
CARBON IONS
CARBON ISOTOPES
CHALCOGENIDES
CHANNELING
CHARGED PARTICLES
CHARGED-PARTICLE REACTIONS
CHEMICAL ANALYSIS
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CRYSTALS
DEUTERON REACTIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EVEN-EVEN NUCLEI
EVEN-ODD NUCLEI
INTERSTITIALS
ION IMPLANTATION
IONS
ISOTOPES
LIGHT NUCLEI
MONOCRYSTALS
NONDESTRUCTIVE ANALYSIS
NONMETALS
NUCLEAR REACTION ANALYSIS
NUCLEAR REACTIONS
NUCLEI
OXIDES
OXYGEN 16
OXYGEN 17
OXYGEN COMPOUNDS
OXYGEN ISOTOPES
PHYSICAL PROPERTIES
POINT DEFECTS
STABLE ISOTOPES
ZINC COMPOUNDS
ZINC OXIDES