Reactive magnetron sputtering of Cu{sub 2}O: Dependence on oxygen pressure and interface formation with indium tin oxide

Journal Article · Wed Jun 01 04:00:00 EDT 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3592981· OSTI ID:21538409

Deuermeier, Jonas; Gassmann, Juergen; Broetz, Joachim; Klein, Andreas ^[1]

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1. Technische Universitaet Darmstadt, Fachbereich Material- und Geowissenschaften, Petersenstrasse 32, D-64287 (Germany)

Thin films of copper oxides were prepared by reactive magnetron sputtering and structural, morphological, chemical, and electronic properties were analyzed using x-ray diffraction, atomic force microscopy, in situ photoelectron spectroscopy, and electrical resistance measurements. The deposition conditions for preparation of Cu(I)-oxide (Cu{sub 2}O) are identified. In addition, the interface formation between Cu{sub 2}O and Sn-doped In{sub 2}O{sub 3} (ITO) was studied by stepwise deposition of Cu{sub 2}O onto ITO and vice versa. A type II (staggered) band alignment with a valence band offset {Delta}E{sub VB} 2.1-2.6 eV depending on interface preparation is observed. The band alignment explains the nonrectifying behavior of p-Cu{sub 2}O/n-ITO junctions, which have been investigated for thin film solar cells.

• OSTI ID: 21538409
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 11 Vol. 109; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALLOYS
ATOMIC FORCE MICROSCOPY
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
DIRECT ENERGY CONVERTERS
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON SPECTROSCOPY
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
INDIUM COMPOUNDS
INDIUM OXIDES
INTERFACES
MAGNETRONS
MATERIALS
MICROSCOPY
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
OPTIMIZATION
OXIDES
OXYGEN
OXYGEN COMPOUNDS
P-N JUNCTIONS
PHOTOELECTRIC CELLS
PHOTOELECTRON SPECTROSCOPY
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SCATTERING
SEMICONDUCTOR JUNCTIONS
SEMICONDUCTOR MATERIALS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTROSCOPY
SPUTTERING
STRESSES
THIN FILMS
TIN ADDITIONS
TIN ALLOYS
TRANSITION ELEMENT COMPOUNDS
VALENCE
X-RAY DIFFRACTION