Polycrystal diamond growth in a microwave plasma torch

Journal Article · Wed Dec 15 04:00:00 EST 2010 · Plasma Physics Reports

DOI:https://doi.org/10.1134/S1063780X10130301· OSTI ID:21443312

Sergeichev, K F; Lukina, N A; Bolshakov, A P; Ralchenko, V G; Arutyunyan, N R; Vlasov, I I ^[1]

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1. Russian Academy of Sciences, Prokhorov Institute of General Physics (Russian Federation)

Diamond films of different structures were deposited on quartz, WC-Co, and molybdenum substrates in a microwave plasma torch discharge in an argon-hydrogen-methane gas mixture in a sealed chamber at pressures close to atmospheric by using the chemical vapor deposition technique. Images of diamond polycrystal films and separate crystals, as well as results of Raman spectroscopy, are presented. The spectra of optical plasma radiation recorded during film deposition demonstrate the presence of intense H{sub {alpha}} hydrogen and C{sub 2} radical bands known as Swan bands.

• OSTI ID: 21443312
• Journal Information: Plasma Physics Reports, Journal Name: Plasma Physics Reports Journal Issue: 13 Vol. 36; ISSN PPHREM; ISSN 1063-780X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKANES
ARGON
CARBIDES
CARBON
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTALS
DEPOSITION
DIAMONDS
DISPERSIONS
ELECTROMAGNETIC RADIATION
ELEMENTS
FILMS
FLUIDS
GASES
HYDROCARBONS
HYDROGEN
LASER SPECTROSCOPY
METALS
METHANE
MICROWAVE RADIATION
MINERALS
MIXTURES
MOLYBDENUM
NONMETALS
ORGANIC COMPOUNDS
OXIDE MINERALS
PLASMA
PLASMA JETS
POLYCRYSTALS
QUARTZ
RADIATIONS
RAMAN SPECTROSCOPY
RARE GASES
REFRACTORY METAL COMPOUNDS
REFRACTORY METALS
SPECTROSCOPY
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN CARBIDES
TUNGSTEN COMPOUNDS