Properties of microwave plasma torch operating at a low pressure

Journal Article · Wed Oct 15 04:00:00 EDT 2008 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.2993210· OSTI ID:21254565

Cho, Soon C; Uhm, Han S; Hong, Yong C; Kim, Jae H ^[1]

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1. Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749 (Korea, Republic of)

A microwave plasma torch system is attached to a low-pressure chamber in this study. The electric field induced in a quartz discharge tube by microwave radiation breaks down the gas at a sufficiently low pressure, igniting the plasma, which is continuously sustained by the microwave radiation. The plasma profile at a very low pressure is shown to be asymmetric with higher density on the incoming side of the microwaves. The gas temperature at the bright spot of the torch plasma measured via the optical emission from hydroxide radicals is shown to increase drastically upon high-pressure operation as the microwave power increases. The electron density at the torch flame is measured by recording the Stark broadening of the hydrogen Balmer beta line. The plasma density increases as the microwave power increases. The typical argon plasma density of a plasma torch powered at 500 W under a pressure of 150 Torr is on the order of 10{sup 14}/cm{sup 3}. The electron temperature in the argon torch plasma was estimated to be 1.5 eV, thereby effectively exciting the molecules in the torch gas. Disintegration of nitrogen fluoride (NF{sub 3}) indicates that a microwave plasma torch operating at a low pressure can efficiently generate an abundant amount of chemical radicals.

• OSTI ID: 21254565
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 15; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ELECTRIC FIELDS
ELECTRON DENSITY
MICROWAVE RADIATION
NITROGEN FLUORIDES
PLASMA
PLASMA DENSITY
PLASMA RADIAL PROFILES