Nanoscale Energy-Filtered Scanning Confocal Electron Microscopy Using a Double-Aberration-Corrected Transmission Electron Microscope

Journal Article · Fri May 21 00:00:00 EDT 2010 · Physical Review Letters

DOI:https://doi.org/10.1103/PHYSREVLETT.104.200801· OSTI ID:21410680

Peng, Wang; Behan, Gavin; Kirkland, Angus I; Nellist, Peter D ^[1]; Takeguchi, Masaki; Hashimoto, Ayako; Mitsuishi, Kazutaka ^[2]; Shimojo, Masayuki ^[3]

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1. Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH (United Kingdom)
2. National Institute for Materials Science, 3-13 Sakura, Tsukuba, 305-0003 (Japan)
3. Advanced Science Research Laboratory, Saitama Institute of Technology, 1690 Fusaiji, Fukaya 369-0293 (Japan)

We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.

• OSTI ID: 21410680
• Journal Information: Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 20 Vol. 104; ISSN 0031-9007; ISSN PRLTAO
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
77 NANOSCIENCE AND NANOTECHNOLOGY
CARBON
CHROMATIC ABERRATIONS
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
ELEMENTS
ENERGY LOSSES
FILMS
FUNCTIONS
GEOMETRICAL ABERRATIONS
LOSSES
MICROSCOPES
MICROSCOPY
NANOSTRUCTURES
NONMETALS
RESOLUTION
RESPONSE FUNCTIONS
SENSITIVITY
TRANSMISSION ELECTRON MICROSCOPY