Tuning fifth-order aberrations in a Quadrupole-Octupole Corrector
Journal Article
·
· Microscopy and Microanalysis
- ORNL
The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration-correctors are then primarily limited by higher-order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.
- Research Organization:
- Oak Ridge National Laboratory (ORNL)
- Sponsoring Organization:
- SC USDOE - Office of Science (SC)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 1055030
- Journal Information:
- Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: 4 Vol. 18; ISSN 1431-9276
- Country of Publication:
- United States
- Language:
- English
Similar Records
Study of octupoles as correctors
Confocal operation of a transmission electron microscope with two aberration correctors
Nanoscale Energy-Filtered Scanning Confocal Electron Microscopy Using a Double-Aberration-Corrected Transmission Electron Microscope
Journal Article
·
Mon Aug 15 00:00:00 EDT 1988
· J. Appl. Phys.; (United States)
·
OSTI ID:6946915
Confocal operation of a transmission electron microscope with two aberration correctors
Journal Article
·
Mon Sep 18 00:00:00 EDT 2006
· Applied Physics Letters
·
OSTI ID:20861131
Nanoscale Energy-Filtered Scanning Confocal Electron Microscopy Using a Double-Aberration-Corrected Transmission Electron Microscope
Journal Article
·
Fri May 21 00:00:00 EDT 2010
· Physical Review Letters
·
OSTI ID:21410680