XRD Analyses of In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N(0{<=}x{<=}0.20) Quaternary Alloys

Journal Article · Wed Jul 07 04:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3469663· OSTI ID:21410535

Yusof, Y; Abid, M A; Raof, N H. Abd; Ng, S S; Hassan, H Abu; Hassan, Z ^[1]

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1. Nano-Optoelectronics Research and Technology Laboratory, School of Physics, Universiti Sains Malaysia, 11800 Penang (Malaysia)

We present the structural properties of quaternary In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N(0{<=}x{<=}0.20) alloys grown on sapphire substrate by molecular beam epitaxy. High resolution X-ray diffraction (HR-XRD) analyses were used to investigate the phase and crystalline quality of quaternary In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N. From the XRD phase analysis, it is confirmed that the In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N films had wurtzite structure and without any phase separation. In addition, it is found that the Bragg angle of the (0002)In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N peak gradually increases as the Al compositions increases, indicating the decrease in the lattice constant c of the In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N quaternary alloys. Apart from that, the composition of In{sub 0.10}Al{sub x}Ga{sub 0.90-x}N epilayers is determined by applying the Vegard's law. Finally, the variation of the crystalline quality as a function of Al composition is investigated through the XRD rocking curve analyses.

• OSTI ID: 21410535
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1250; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALLOY SYSTEMS
ALLOYS
ALUMINIUM ALLOYS
BRAGG REFLECTION
COHERENT SCATTERING
CRYSTAL GROWTH METHODS
DIFFRACTION
EPITAXY
FILMS
GALLIUM ALLOYS
INDIUM ALLOYS
LATTICE PARAMETERS
MOLECULAR BEAM EPITAXY
NEUTRON DIFFRACTION
NITROGEN COMPOUNDS
PHASE STUDIES
QUATERNARY ALLOY SYSTEMS
REFLECTION
RESOLUTION
SCATTERING
SUBSTRATES
VEGARD LAW
X-RAY DIFFRACTION