Development of an atmospheric-pressure homogeneous and cold Ar/O{sub 2} plasma source operating in glow discharge

Journal Article · Tue Jun 15 00:00:00 EDT 2010 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.3447877· OSTI ID:21378060

Shouzhe, Li; Qi, Wu; Jialiang, Zhang; Dezhen, Wang ^[1]; Uhm, Han S ^[2]

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1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023 (China)
2. Kwangwoon Academy of Advanced Studies, Kwangwoon University, 447-1 Wolgye-dong, Nowon-gu, Seoul 137-701 (Korea, Republic of)

An atmospheric-pressure Ar/O{sub 2} glow discharge is generated in a parallel bare metal plate reactor with a radio-frequency power supply by introducing a dielectric strip in the inlet of the gas flow. The role of the dielectric strip is discussed experimentally. The allowable oxygen-to-argon ratio reaches 1.0 vol % and the generated Ar/O{sub 2} plasma discharge is characterized by a low gas temperature and good spatial homogeneity, implying its feasible application as a type of material treatment for a large-area surface, as illustrated experimentally by the ashing of carbon black.

• OSTI ID: 21378060
• Journal Information: Physics of Plasmas, Vol. 17, Issue 6; Other Information: DOI: 10.1063/1.3447877; (c) 2010 American Institute of Physics; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ATMOSPHERIC PRESSURE
CARBON BLACK
DIELECTRIC MATERIALS
DIELECTRIC PROPERTIES
GLOW DISCHARGES
OXYGEN
PLASMA
CARBON
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTS
FLUIDS
GASES
MATERIALS
NONMETALS
PHYSICAL PROPERTIES
RARE GASES