Radio-frequency dielectric-barrier glow discharges in atmospheric argon

Journal Article · Mon Mar 12 00:00:00 EDT 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2713141· OSTI ID:20960145

Shi, J J; Kong, M G ^[1]

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1. Department of Electronic and Electrical Engineering, Loughborough University, Loughborough, Leicestershire LE11 3TU (United Kingdom)

In this letter, an experimental investigation is presented to characterize the properties and benefits of radio-frequency (rf) dielectric-barrier discharges (DBDs) in atmospheric argon. Compared to rf atmospheric glow discharges generated with bare electrodes, atmospheric argon rf DBDs are shown to remain stable and uniform over a large current range from the {alpha} and the {gamma} modes. Optical emission spectroscopy is used to show an active underpinning plasma chemistry and a gas temperature range of 461-562 K. These highlight the advantages of argon rf DBD as a surface processing technique over more expensive helium-based rf atmospheric glow discharges.

• OSTI ID: 20960145
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 11 Vol. 90; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
DIELECTRIC MATERIALS
ELECTRODES
ELECTRON TEMPERATURE
EMISSION SPECTROSCOPY
GLOW DISCHARGES
HELIUM
HIGH-FREQUENCY DISCHARGES
ION TEMPERATURE
PLASMA
PLASMA DIAGNOSTICS
PLASMA INSTABILITY
RADIOWAVE RADIATION
TEMPERATURE RANGE 0400-1000 K