Discharge characteristics of atmospheric-pressure radio-frequency glow discharges with argon/nitrogen
- Department of Engineering Physics, Tsinghua University, Beijing 100084 (China)
In this letter, atmospheric-pressure glow discharges in {gamma} mode with argon/nitrogen as the plasma-forming gas using water-cooled, bare copper electrodes driven by radio-frequency power supply at 13.56 MHz are achieved. The preliminary studies on the discharge characteristics show that, induced by the {alpha}-{gamma} coexisting mode or {gamma} mode discharge of argon, argon-nitrogen mixture with any mixing ratios, even pure nitrogen, can be employed to generate the stable {gamma} mode radio-frequency, atmospheric-pressure glow discharges and the discharge voltage rises with increasing the fraction of nitrogen in the argon-nitrogen mixture for a constant total gas flow rate.
- OSTI ID:
- 20880034
- Journal Information:
- Applied Physics Letters, Vol. 89, Issue 16; Other Information: DOI: 10.1063/1.2362631; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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