Experimental estimation of Langmuir probe measurements accuracy under RF-discharge conditions

Conference · Sun Dec 31 04:00:00 EST 1995

OSTI ID:212861

Abdullin, I Sh ^[1]; Bragin, V E; Bykanov, A N ^[2]

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1. State Scientific Industry Cooper, Kazan (Russian Federation)
2. Moscow Institute of Physics & Technology (Russian Federation)

One of useful diagnostic technique in glow discharge is Langmuir probe. But it`s application for RF discharge faced the problem of distortion the Voltage-Current Characteristic (VCC) because of rectification of RF voltage applied to near probe sheath. Numerous methods of diminishing this effect are developed. All these methods tends to decrease RF voltage drop on probe sheath. Some of them use for this purpose active circuit applying some RF voltage to the probe, another - passive circuit to decrease the RF impedance of external circuit or to increase capacitive coupling probe with plasma. In this article the criteria of these measures is investigated from the point of view of accuracy of VCC determination. The error is defined as difference between probe DC voltage corresponding to some current level in the case of RF voltage applied to probe sheath and in non-disturbed case.

• OSTI ID: 212861
• Report Number(s): CONF-950749--
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
66 PHYSICS
ACCURACY
ERRORS
GLOW DISCHARGES
LANGMUIR PROBE
PLASMA DIAGNOSTICS