Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell

Journal Article · Fri Dec 01 04:00:00 EST 1995 · IEEE Transactions on Plasma Science

DOI:https://doi.org/10.1109/27.476490· OSTI ID:203669

Sobolewski, M A ^[1]

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1. National Inst. of Standards and Technology, Gaithersburg, MD (United States)

Measurements of the current and voltage at both electrodes of a parallel-plate, capacitively coupled RF discharge cell (the Gaseous Electronics Conference Reference Cell) were combined with measurements of the voltage on a wire inserted into the flow region between the electrodes, for argon discharges at pressures of 1.3--133 Pa and peak-to-peak applied voltages {le}400 V. Together, these measurements determined the RF voltage, current, impedance, and power of each sheath of the plasma. Simple power laws were found to describe changes in sheath impedances observed as voltage and pressure were varied. An equivalent circuit model for the electrical behavior of the discharge was obtained. The equivalent circuit model can be used to relate the electrical data to plasma properties such as electron densities, ion currents, and sheath widths. The results differ from models previously proposed for asymmetric RF discharges, and the implications of this disagreement are discussed.

• OSTI ID: 203669
• Journal Information: IEEE Transactions on Plasma Science, Journal Name: IEEE Transactions on Plasma Science Journal Issue: 6 Vol. 23; ISSN ITPSBD; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
ELECTRIC CURRENTS
ELECTRIC POTENTIAL
ELECTRICAL PROPERTIES
EXPERIMENTAL DATA
HIGH-FREQUENCY DISCHARGES
MATHEMATICAL MODELS
PLASMA SHEATH