Experimental test of models of radio-frequency plasma sheaths
- National Institute of Standards and Technology, Gaithersburg, Maryland 20899 (United States)
The ion current and sheath impedance were measured at the radio-frequency-powered electrode of an asymmetric, capacitively coupled plasma reactor, for discharges in argon at 1.33{endash}133 Pa. The measurements were used to test the models of the radio frequency sheath derived by Lieberman [IEEE Trans. Plasma Sci. {bold 17}, 338 (1989)] and Godyak and Sternberg [Phys. Rev. A {bold 42}, 2299 (1990)], and establish the range of pressure and sheath voltage in which they are valid. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 467163
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 8 Vol. 70; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Dynamic model of the radio-frequency plasma sheath in a highly asymmetric discharge cell
Electron heating in low pressure capacitive discharges revisited
Description of plasma focus current sheath as the Turner relaxed state of a Hall magnetofluid
Journal Article
·
Tue Jul 01 00:00:00 EDT 1997
· Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
·
OSTI ID:526971
Electron heating in low pressure capacitive discharges revisited
Journal Article
·
Sun Dec 14 23:00:00 EST 2014
· Physics of Plasmas
·
OSTI ID:22407950
Description of plasma focus current sheath as the Turner relaxed state of a Hall magnetofluid
Journal Article
·
Mon Dec 14 23:00:00 EST 2009
· Physics of Plasmas
·
OSTI ID:21371246