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Heat- and radiation-resistant contacts to SiC made on the basis of quasi-amorphous ZrB{sub 2} films

Journal Article · · Semiconductors
 [1]; ;  [2];  [3]; ;  [1]
  1. National Academy of Sciences of Ukraine, Lashkarev Institute of Semiconductor Physics (Ukraine)
  2. State Scientific and Research Institute 'Orion' (Ukraine)
  3. National Academy of Sciences of Ukraine, Paton Institute of Electric Welding (Ukraine)
The radiation and thermal stability of the Schottky-barrier structures deposited by the magnetron sputtering of zirconium diboride onto the (0001) face of the Lely-grown n-6H(15R)SiC single crystals with the uncompensated-donor concentration of {approx}10{sup 18} cm{sup -3} was investigated by the methods of the I-V and C-V characteristics combined with the layer-by-layer Auger analysis. It is shown that the use of quasi-amorphous ZrB{sub 2} films when manufacturing contacts on n-6H(15R)SiC leads to no changes in the Schottky-barrier characteristics during rapid thermal annealing to 800 deg. C in the range of {sup 60}Co {gamma}-ray irradiation doses of 10{sup 3}-10{sup 7} Gy.
OSTI ID:
21260352
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 6 Vol. 43; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English

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