Correlation of Beam Transport Characteristics and Mass Resolving Power to Analyzing Magnet Pole Piece Wear in Axcelis HE Ion Implanters
Journal Article
·
· AIP Conference Proceedings
- INNOViON Corporation 4253 NE 189th Avenue Gresham, OR 97230 US (United States)
- Maxim Integrated Products 14320 Jenkins Road Beaverton, OR 97005 (United States)
An investigation into odd analyzing magnet tuning behavior on an Axcelis HE ion implanter revealed a correlation to excessive wear on the analyzer magnet pole pieces. Though the lifetime is generally quite good, the pole pieces are internal to the beamline design and are exposed to and sputtered by the ion beam during mass analysis. This erosion of the pole piece surfaces affects beam focus and transport, especially for lower current ion beams. Eventually, automatic beam set-up fails altogether as the system is unable to locate the correct amu peak. It is important to understand and correct any deficiencies in pole piece condition as long-term neglect will eventually lead to process errors. Data is presented to illustrate good and bad pole piece condition and a method is suggested for non-invasive testing.
- OSTI ID:
- 21251650
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1066; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
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