Multipole implantation-isotope separation ion beam source

Patent · Tue May 10 04:00:00 EDT 1983

OSTI ID:5960486

Keller, J H; Mckenna, C M

A plurality of magnetic pole pieces are arranged around the external wall of a high temperature plasma confining structure. The pole pieces are positioned between permanent magnets spaced from one another and the confining structure by distances calculated to produce a minimum field toward the center of the structure with an effective containing field around the periphery of the structure. The magnets and the pole pieces are cooled. An odd number of poles are employed such that the missing pole appears as a virtual pole at the extraction slit used for forming an ion beam for ion implantation. The resulting small package multipole plasma containment functions to provide higher beam current, longer source lifetime, higher voltage stability and reduces maintenance and cleaning operations, with the permanent magnets protected from high temperature and corrosive gases.

• Assignee: International Business Machines Corp
• Patent Number(s): US 4383177
• OSTI ID: 5960486
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAMS
CLOSED CONFIGURATIONS
CONFINEMENT
ION BEAMS
ION IMPLANTATION
ISOTOPE SEPARATION
MAGNETIC FIELD CONFIGURATIONS
MAGNETS
MULTIPOLAR CONFIGURATIONS
MULTIPOLES
PLASMA CONFINEMENT
SEPARATION PROCESSES