Ferroelectric properties of Pb(Mn{sub 1/3}Nb{sub 2/3})O{sub 3}-Pb(Zr,Ti)O{sub 3} thin films epitaxially grown on (001)MgO substrates

Journal Article · Tue Jul 15 00:00:00 EDT 2008 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2900659· OSTI ID:21192405

Tao, Zhang; Wasa, Kiyotaka; Kanno, Isaku; Shuyi, Zhang ^[1]

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1. Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093 (China)

Ferroelectric ternary perovskite thin films of 0.06Pb(Mn{sub 1/3},Nb{sub 2/3})O{sub 3} (PMnN)-0.42PbZrO{sub 3} (PZ)-0.52PbTiO{sub 3} (PT)[0.06PMnN-0.94PZT(45/55)] have been grown on the (001)MgO substrates by radio frequency-magnetron sputtering with quenching processing. The deposition conditions, microstructures, piezoelectric, and ferroelectric properties of the ternary perovskite thin films are described in comparison with the binary compounds of PZ-PT (PZT). The out-plane x-ray diffraction (XRD) measurements for the ternary PMnN-PZT perovskite thin films of 1 to 1-3 {mu}m in film thickness show strong single (001) orientation. The in-plane {phi}-scan XRD curve verified the ternary thin films are single crystals of perovskite structure. Their lattice parameters are almost the same as bulk values and the ternary thin films are almost stress free. The PMnN-PZT thin films show high density without columnar structure. The PZT-based ternary perovskite thin films with the small addition of PMnN, i.e., 6 mole % PMnN, exhibit a strong hard ferroelectric response, i.e., P{sub s}=60 {mu}C/cm{sup 2} and 2E{sub c}=230 kV/cm. Their effective piezoelectric constants are typically e{sub 31,eff}=-7.7 C/m{sup 2}. These values are slightly higher than those of binary perovskite PZT thin 0011fil.

• OSTI ID: 21192405
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 26; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
COMPARATIVE EVALUATIONS
CRYSTAL STRUCTURE
EPITAXY
FERROELECTRIC MATERIALS
LATTICE PARAMETERS
MAGNESIUM OXIDES
MAGNETRONS
MANGANESE COMPOUNDS
MICROSTRUCTURE
MONOCRYSTALS
PERMITTIVITY
PEROVSKITE
PIEZOELECTRICITY
PZT
RADIOWAVE RADIATION
SPUTTERING
SUBSTRATES
THICKNESS
THIN FILMS
X-RAY DIFFRACTION