C{sub 2} and CN dynamics and pulsed laser deposition of CN{sub x} films

Journal Article · Sun Feb 15 04:00:00 EST 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3078078· OSTI ID:21190044

Kushwaha, Archana; Mohanta, Antaryami; Thareja, Raj K ^[1]

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1. Department of Physics, Indian Institute of Technology Kanpur, Kanpur-208 016 (UP) (India)

The time-resolved optical emission studies of laser ablated carbon plasma in nitrogen ambient are carried out to understand the dynamic of formation of C{sub 2} and CN for depositing quality thin films. An optimum formation of C{sub 2} is observed at 3 mm from the target surface and 350 ns after the initiation of plasma. However, CN is formed at comparatively larger distance, 4 mm, and larger delay (850 ns). The expanding plasma plume splits/bifurcates into slow and fast moving two distinct components, with the faster components further splitting up at later times (>350 ns) into two components. The estimated plume front velocity from plume imaging in the nitrogen ambient of 1.2 mbars at a delay of 100 ns is 3.8x10{sup 6} cm/s, consistent with spectroscopic measurement {approx}3.0x10{sup 6} cm/s. The CN{sub x} thin films deposited by pulsed laser deposition technique are characterized by x-ray diffraction, atomic force microscopy, and Raman spectroscopy. The high I{sub D}/I{sub G} ratio and peak position shift of G band to lower values in the films deposited for longer time indicates the high incorporation of nitrogen and increasing CN concentration within the film.

• OSTI ID: 21190044
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 4 Vol. 105; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABLATION
ATOMIC FORCE MICROSCOPY
CARBON
CARBON NITRIDES
ENERGY BEAM DEPOSITION
LASER RADIATION
LASERS
NITROGEN
PLASMA
PLUMES
PULSED IRRADIATION
RAMAN SPECTRA
RAMAN SPECTROSCOPY
THIN FILMS
TIME RESOLUTION
X-RAY DIFFRACTION