Properties of a low-pressure inductive RF discharge I: Experiment

Journal Article · Sat Sep 15 04:00:00 EDT 2007 · Plasma Physics Reports

DOI:https://doi.org/10.1134/S1063780X07090048· OSTI ID:21100141

Aleksandrov, A F; Vavilin, K V; Kral'kina, E A; Pavlov, V B ^[1]; Rukhadze, A A ^[2]

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1. Moscow State University (Russian Federation)
2. Russian Academy of Sciences, Prokhorov Institute of General Physics (Russian Federation)

Results are presented from experimental studies of low-pressure inductive RF discharges (including those with a capacitive component) employed in plasma technology. It is shown that both the RF power absorbed in the plasma and the electron density depend nonmonotonically on the external magnetic field. Discharge disruptions occurring at critical values of the magnetic field and the spatial redistribution and hysteresis of the plasma parameters were observed when varying the magnetic field and RF generator power. The parameters of the plasma of low-pressure (0.5-5 mTorr) inductive RF discharges were investigated, and the discharge properties related to the redistribution of the RF generator power between the plasma and the discharge external circuit were revealed. The experiments were performed with both conventional unmagnetized inductive plasma sources and plasma sources with a magnetic field.

• OSTI ID: 21100141
• Journal Information: Plasma Physics Reports, Journal Name: Plasma Physics Reports Journal Issue: 9 Vol. 33; ISSN PPHREM; ISSN 1063-780X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRON DENSITY
HYSTERESIS
MAGNETIC FIELDS
PLASMA
RADIOWAVE RADIATION