Properties of a low-pressure inductive RF discharge II: Mathematical simulations

Journal Article · Sat Sep 15 04:00:00 EDT 2007 · Plasma Physics Reports

DOI:https://doi.org/10.1134/S1063780X0709005X· OSTI ID:21100140

Aleksandrov, A F; Vavilin, K V; Kral'kina, E A; Pavlov, V B ^[1]; Rukhadze, A A ^[2]

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1. Moscow State University (Russian Federation)
2. Russian Academy of Sciences, Prokhorov Institute of General Physics (Russian Federation)

Self-consistent numerical simulations of a low-pressure inductive RF discharge have been carried out. It is shown that, on the one hand, the plasma parameters are determined by the RF power absorbed in the plasma and, on the other, they themselves govern the power absorption. This results in a nonmonotonic dependence of the plasma parameters on the magnetic field, as well as in discharge disruptions, similar to those observed experimentally in such discharges. An inductive RF discharge with a capacitive component is simulated. The experimentally observed characteristic properties of the discharges are explained based on the regular features of the absorption of RF power in the plasma. Traditional inductive plasma sources (both without and with a magnetic field) are considered.

• OSTI ID: 21100140
• Journal Information: Plasma Physics Reports, Journal Name: Plasma Physics Reports Journal Issue: 9 Vol. 33; ISSN PPHREM; ISSN 1063-780X
• Country of Publication: United States
• Language: English

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