Negative Power Absorption in Inductively Coupled Plasma

Journal Article · Mon Dec 01 04:00:00 EST 1997 · Physical Review Letters

DOI:https://doi.org/10.1103/PhysRevLett.79.4589· OSTI ID:550585

Godyak, V A ^[1]; Kolobov, V I ^[2]

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1. OSRAM SYLVANIA Products Inc., 71 Cherry Hill Drive, Beverly, Massachusetts 01915 (United States)
2. Department of Chemical Engineering, University of Houston, Houston, Texas 77204-4792 (United States)

We report an observation of negative power absorption of electromagnetic field in a low-pressure cylindrical inductive discharge. The spatial distribution of the absorbed power is found experimentally from measurement of the azimuthal rf electric field and current, and theoretically by solving the Maxwell-Boltzmann equations by Fourier method. It appears that plasma electrons, which absorb electromagnetic energy in the skin layer, can apparently return a part of their energy to the rf field deeper into the plasma. {copyright} {ital 1997} {ital The American Physical Society}

• OSTI ID: 550585
• Journal Information: Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 23 Vol. 79; ISSN 0031-9007; ISSN PRLTAO
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ABSORPTION
BOLTZMANN EQUATION
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTROMAGNETIC FIELDS
ELECTRONS
FOURIER TRANSFORMATION
LAYERS
PLASMA
SKIN