Inductive electron heating revisited
- Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
The induced rf magnetic fields of low-frequency inductively coupled plasmas are measured and modeled [M. Tuszewski, Phys. Rev. Lett. {bold 77}, 1286 (1996)]. The fields penetrate deep into the discharges, in contrast with existing predictions of field decay within a thin skin layer. Fluid calculations suggest that the enhanced rf penetration is due to a reduction of the plasma conductivity by the induced magnetic fields. In this paper, new oxygen and argon data concerning rf power absorption are reported and a general description of inductive electron heating is suggested. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 560648
- Report Number(s):
- CONF-961102--
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 5 Vol. 4; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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