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Inductive electron heating revisited

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.872335· OSTI ID:560648
 [1]
  1. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
The induced rf magnetic fields of low-frequency inductively coupled plasmas are measured and modeled [M. Tuszewski, Phys. Rev. Lett. {bold 77}, 1286 (1996)]. The fields penetrate deep into the discharges, in contrast with existing predictions of field decay within a thin skin layer. Fluid calculations suggest that the enhanced rf penetration is due to a reduction of the plasma conductivity by the induced magnetic fields. In this paper, new oxygen and argon data concerning rf power absorption are reported and a general description of inductive electron heating is suggested. {copyright} {ital 1997 American Institute of Physics.}
OSTI ID:
560648
Report Number(s):
CONF-961102--
Journal Information:
Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 5 Vol. 4; ISSN PHPAEN; ISSN 1070-664X
Country of Publication:
United States
Language:
English

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