Enhanced Radio Frequency Field Penetration in an Inductively Coupled Plasma

Journal Article · Thu Aug 01 04:00:00 EDT 1996 · Physical Review Letters

DOI:https://doi.org/10.1103/PhysRevLett.77.1286· OSTI ID:286982

Tuszewski, M ^[1]

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1. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)

The induced radio frequency magnetic fields of a low-frequency inductively coupled plasma are measured and modeled. The fields penetrate deep into the discharge, in contrast with existing predictions of field decay within a thin skin layer. Fluid calculations show that the enhanced penetration is due to a reduction of the plasma conductivity by the induced magnetic fields. {copyright} {ital 1996 The American Physical Society.}

• OSTI ID: 286982
• Journal Information: Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 7 Vol. 77; ISSN 0031-9007; ISSN PRLTAO
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
DENSITY
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTRIC HEATING
MAGNETIC FIELDS
PENETRATION DEPTH
PLASMA
RF SYSTEMS