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Calibration of atomic force microscope cantilevers using piezolevers

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.2719649· OSTI ID:20953426
;  [1]
  1. Department of Engineering Mechanics, W317.4 Nebraska Hall, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0526 (United States)

The atomic force microscope (AFM) can provide qualitative information by numerous imaging modes, but it can also provide quantitative information when calibrated cantilevers are used. In this article a new technique is demonstrated to calibrate AFM cantilevers using a reference piezolever. Experiments are performed on 13 different commercially available cantilevers. The stiff cantilevers, whose stiffness is more than 0.4 N/m, are compared to the stiffness values measured using nanoindentation. The experimental data collected by the piezolever method is in good agreement with the nanoindentation data. Calibration with a piezolever is fast, easy, and nondestructive and a commercially available AFM is enough to perform the experiments. In addition, the AFM laser must not be calibrated. Calibration is reported here for cantilevers whose stiffness lies between 0.08 and 6.02 N/m.

OSTI ID:
20953426
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 4 Vol. 78; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English

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