Precise atomic force microscope cantilever spring constant calibration using a reference cantilever array
- Materials Science and Engineering Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Stop 8526--Gaithersburg, Maryland 20899 (United States)
A method for calibrating the stiffness of atomic force microscope (AFM) cantilevers is demonstrated using an array of uniform microfabricated reference cantilevers. A series of force-displacement curves was obtained using a commercial AFM test cantilever on the reference cantilever array, and the data were analyzed using an implied Euler-Bernoulli model to extract the test cantilever spring constant from linear regression fitting. The method offers a factor of 5 improvement over the precision of the usual reference cantilever calibration method and, when combined with the Systeme International traceability potential of the cantilever array, can provide very accurate spring constant calibrations.
- OSTI ID:
- 21024152
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 8 Vol. 78; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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