Patterning of metal nanowires by directed ion-induced dewetting

Journal Article · Mon Jul 31 04:00:00 EDT 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2261271· OSTI ID:20860653

Zhao, K; Averback, R S; Cahill, David G ^[1]

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1. Department of Materials Science and Engineering, Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)

Ion beam irradiation of thin Au and Pt lines on SiO{sub 2} substrates, 60-400 nm wide and 8-25 nm thick, led to the formation of nanowires by directed dewetting. Continued irradiation of these wires further resulted in the formation of a linear array of metal dots with spacings consistent with a Rayleigh instability. For metal lines wider than {approx_equal}250 nm, dry patches nucleated in the interior of the lines, preventing nanowire formation. The height of the lines relative to the substrate surface could be controlled by anisotropic deformation of the underlying SiO{sub 2} substrate.

• OSTI ID: 20860653
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 5 Vol. 89; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANISOTROPY
DEFORMATION
GOLD
ION BEAMS
IRRADIATION
PLATINUM
QUANTUM WIRES
SILICON OXIDES
SUBSTRATES