Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60 nm resolution tomography

Journal Article · Mon Jun 12 00:00:00 EDT 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2211300· OSTI ID:20779394

Yin, G -C; Tang, M -T; Song, Y -F; Chen, F -R; Liang, Keng S; Duewer, Frederick W; Wenbing, Yun; Ko, C -H; Shieh, H -P.D. ^[1]

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1. National Synchrotron Radiation Research Center, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan (China) and Department of Photonics and Display Institute National Chiao Tung University, Hsinchu 300, Taiwan (China)

An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.

• OSTI ID: 20779394
• Journal Information: Applied Physics Letters, Vol. 88, Issue 24; Other Information: DOI: 10.1063/1.2211300; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ABSORPTION
COMPUTER CODES
FEEDBACK
HARD X RADIATION
ILLUMINANCE
MICROSCOPES
MICROSCOPY
PLATES
SPATIAL RESOLUTION
TOMOGRAPHY
TRANSMISSION