Hard X-ray Microscopy with sub 30 nm Spatial Resolution

Journal Article · Fri Jan 19 04:00:00 EST 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2436296· OSTI ID:21049256

Tang, M -T; Song, Y -F; Yin, G -C; Chen, J -H; Chen, Y -M; Liang, Keng S ^[1]; Chen, F -R ^[1]; Duewer, F; Wenbing, Yun ^[2]

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1. National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan (China)
2. Xradia Inc., Concord, CA 94520 (United States)

A transmission X-ray microscope (TXM) has been installed at the BL01B beamline at National Synchrotron Radiation Research Center in Taiwan. This state-of-the-art TXM operational in a range 8-11 keV provides 2D images and 3D tomography with spatial resolution 60 nm, and with the Zernike-phase contrast mode for imaging light materials such as biological specimens. A spatial resolution of the TXM better than 30 nm, apparently the best result in hard X-ray microscopy, has been achieved by employing the third diffraction order of the objective zone plate. The TXM has been applied in diverse research fields, including analysis of failure mechanisms in microelectronic devices, tomographic structures of naturally grown photonic specimens, and the internal structure of fault zone gouges from an earthquake core. Here we discuss the scope and prospects of the project, and the progress of the TXM in NSRRC.

• OSTI ID: 21049256
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 879; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
DIFFRACTION
EARTHQUAKES
HARD X RADIATION
IMAGES
KEV RANGE
MICROSCOPY
PLATES
SPATIAL RESOLUTION
SYNCHROTRON RADIATION
TOMOGRAPHY
TRANSMISSION