Quantification of the H content in diamondlike carbon and polymeric thin films by reflection electron energy loss spectroscopy

Journal Article · Mon Aug 22 00:00:00 EDT 2005 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2011786· OSTI ID:20709721

Yubero, F; Rico, V J; Espinos, J P; Cotrino, J; Gonzalez-Elipe, A R ^[1]

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1. ICMSE (CSIC-USE) Americo Vespucio s/n, E-41092 Sevilla (Spain)

A nondestructive method to determine the hydrogen content at the surface of diamondlike carbon and polymeric thin films is proposed. The method relies on the analysis of the elastic peak produced by backscattering of electrons from the hydrogen atoms present at the sample surface. Quantitative analysis of the H content at the surface is achieved through use of a phenomenological sensitivity factor for elastic electron backscattering by H atoms with respect to other atoms present at the surface of reference polymeric samples. The validity of the method is checked with elastic recoil detection measurements and infrared spectroscopy analysis of the same samples. The accuracy of the method in the determination of H content at the sample surface is estimated to be {+-}10%.

• OSTI ID: 20709721
• Journal Information: Applied Physics Letters, Vol. 87, Issue 8; Other Information: DOI: 10.1063/1.2011786; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABSORPTION SPECTROSCOPY
BACKSCATTERING
DIAMONDS
ENERGY-LOSS SPECTROSCOPY
HYDROGEN
INFRARED SPECTRA
ION MICROPROBE ANALYSIS
NONDESTRUCTIVE TESTING
RUTHERFORD BACKSCATTERING SPECTROSCOPY
THIN FILMS