Raman scattering and hydrogen-content analysis of amorphous hydrogenated carbon films irradiated with 200-keV C sup + ions

Journal Article · Tue May 15 04:00:00 EDT 1990 · Physical Review, B: Condensed Matter; (USA)

DOI:https://doi.org/10.1103/PhysRevB.41.10132· OSTI ID:7055918

Farrow, L A; Wilkens, B J; Gozdz, A S; Hart, D L ^[1]

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1. Bellcore, Red Bank, NJ (USA)

Amorphous hydrogenated diamondlike'' carbon films ({ital a}-C:H) have been modified by bombardment with 200-keV C{sup +} ions at four doses ranging from 10{sup 14} to 10{sup 17} cm{sup {minus}2}. Ratios of carbon to hydrogen in the resulting samples have been determined with use of elastic recoil detection (ERD) and Rutherford backscattering (RBS); hydrogen content is significantly reduced as the dose is increased. Raman scattering data indicate increasing graphitization with increasing ion dose. These data have been analyzed to determine position and width of previously observed {ital G} and {ital D} lines. Raman scattering results obtained for {ital a}-C:H films annealed at temperatures up to 800 {degree}C indicate that C{sup +}-ion bombardment and high-temperature annealing of {ital a}-C:H films have a similar effect on their structure. Data obtained from all of the measurement techniques cited above indicate that the major changes occur in the {ital a}-C:H films implanted with doses of 10{sup 16} cm{sup {minus}2} or greater.

• OSTI ID: 7055918
• Journal Information: Physical Review, B: Condensed Matter; (USA), Journal Name: Physical Review, B: Condensed Matter; (USA) Vol. 41:14; ISSN 0163-1829; ISSN PRBMD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
CARBON
CARBON IONS
CHARGED PARTICLES
CHEMICAL REACTIONS
COLLISIONS
ELEMENTS
ENERGY RANGE
FILMS
HYDROGENATION
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 100-1000
NONMETALS
PHYSICAL RADIATION EFFECTS
QUANTITY RATIO
RADIATION EFFECTS
RAMAN SPECTRA
RECOILS
SPECTRA