Hydrogen content estimation of hydrogenated amorphous carbon by visible Raman spectroscopy

Journal Article · Wed Dec 01 04:00:00 EST 2004 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1811397· OSTI ID:20658094

Adamopoulos, G; Robertson, J; Morrison, N A; Godet, C ^[1]

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1. Laboratoire de Physique des Interfaces et des Couches Minces, UMR 7647 CNRS, Ecole Polytechnique, 91128 Palaiseau Cedex (France)

In the present study, we report the hydrogen content estimation of the hydrogenated amorphous carbon (a-C:H) films using visible Raman spectroscopy in a fast and nondestructive way. Hydrogenated diamondlike carbon films were deposited by the plasma enhanced chemical vapor deposition, plasma beam source, and integrated distributed electron cyclotron resonance techniques. Methane and acetylene were used as source gases resulting in different hydrogen content and sp{sup 2}/sp{sup 3} fraction. Ultraviolet-visible (UV-Vis) spectroscopic ellipsometry (1.5-5 eV) as well as UV-Vis spectroscopy were provided with the optical band gap (Tauc gap). The sp{sup 2}/sp{sup 3} fraction and the hydrogen content were independently estimated by electron energy loss spectroscopy and elastic recoil detection analysis-Rutherford back scattering, respectively. The Raman spectra that were acquired in the visible region using the 488 nm line shows the superposition of Raman features on a photoluminescence (PL) background. The direct relationship of the sp{sup 2} content and the optical band gap has been confirmed. The difference in the PL background for samples of the same optical band gap (sp{sup 2} content) and different hydrogen content was demonstrated and an empirical relationship between the visible Raman spectra PL background slope and the corresponding hydrogen content was extracted.

• OSTI ID: 20658094
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 11 Vol. 96; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACETYLENE
CHEMICAL VAPOR DEPOSITION
DIAMONDS
ELECTRON CYCLOTRON-RESONANCE
ELLIPSOMETRY
ENERGY GAP
ENERGY-LOSS SPECTROSCOPY
EV RANGE 01-10
HYDROGEN
METHANE
PHOTOLUMINESCENCE
PLASMA
RAMAN SPECTRA
RAMAN SPECTROSCOPY
RECOILS
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SEMICONDUCTOR MATERIALS
THIN FILMS
ULTRAVIOLET RADIATION
VISIBLE SPECTRA