Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing
Journal Article
·
· Journal of Applied Physics
- Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, 440-746 (Korea, Republic of)
An internal-type linear inductive antenna, that is, a double-comb-type antenna, was developed for a large-area plasma source having the size of 1020 mmx830 mm, and high density plasmas on the order of 2.3x10{sup 11} cm{sup -3} were obtained with 15 mTorr Ar at 5000 W of inductive power with good plasma stability. This is higher than that for the conventional serpentine-type antenna, possibly due to the low impedance, resulting in high efficiency of power transfer for the double-comb antenna type. In addition, due to the remarkable reduction of the antenna length, a plasma uniformity of less than 8% was obtained within the substrate area of 880 mmx660 mm at 5000 W without having a standing-wave effect.
- OSTI ID:
- 20668240
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 6 Vol. 97; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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