Boron-enhanced blistering and exfoliation in hydrogen-implanted SrTiO{sub 3}

Journal Article · Wed Dec 15 04:00:00 EST 2004 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1804623· OSTI ID:20662204

Lee, Jung-Kun; Averitt, Richard D; Nastasi, Michael ^[1]

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1. Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)

The blistering behavior and the exfoliation of SrTiO{sub 3} single crystals were investigated using co-implantation with boron and hydrogen. In contrast to H-only-implantation, co-implantation of B{sup +} with 1x10{sup 15} ions/cm{sup 2} at 80 kV and H{sup +} with 5x10{sup 16} ions/cm{sup 2} at 40 kV caused a vigorous blistering and a complete exfoliation during the annealing process. A comparison of the blistering depth and the hydrogen distribution in the co-implanted samples revealed that the exfoliation did not occur in the regions of maximum hydrogen concentration or maximum hydrogen-related radiation damage. It occurred at the crossover of the boron distribution profile and hydrogen distribution profile. With the aid of an elastic recoil detection and the Rutherford backscattering spectroscopy in the channeling mode, the preimplanted boron was found to facilitate the long-range H movement into the B-implanted region, resulting in the chemical interaction between B and H. A bond analysis obtained from the Fourier transform infrared-attenuated total reflection spectroscopy showed that B-H interactions resulted in the formation of boron hydride. It is proposed that the boron hydride formation and decomposition upon annealing provided the needed gas pressure for the complete exfoliation of B+H co-implanted SrTiO{sub 3} crystals.

• OSTI ID: 20662204
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 96; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
BORON
BORON HYDRIDES
CHANNELING
COMPARATIVE EVALUATIONS
CRYSTAL STRUCTURE
DECOMPOSITION
DISSOCIATION
FOURIER TRANSFORMATION
HYDROGEN
HYDROGEN IONS 1 PLUS
IMPURITIES
INFRARED SPECTRA
ION IMPLANTATION
MICROSTRUCTURE
MONOCRYSTALS
RECOILS
REFLECTION
RUTHERFORD BACKSCATTERING SPECTROSCOPY
STRONTIUM TITANATES