Collisional ion dynamics in capacitively coupled rf discharges

Journal Article · Sat Jan 01 04:00:00 EST 2005 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.1821586· OSTI ID:20636952

Xiang, N; Waelbroeck, F L ^[1]

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1. Institute for Fusion Studies, University of Texas, Austin, Texas 78712 (United States)

Based on a one-dimensional fluid model, the collision-dominated ion dynamics in capacitively coupled rf discharges are studied theoretically as well as numerically in the low rf frequency regime {omega}{<=}V{sub B}/l (here {omega} is the rf frequency, V{sub B} is the Bohm velocity, and l is the plasma length). It is found that the ion current entering the sheath varies with time as we have shown in the collisionless sheath [N. Xiang and F. L. Waelbroeck, J. Appl. Phys. 93, 5034 (2003)]. The mechanisms for the ion current modulation in the collision-dominated and collisionless sheaths, however, are different. It is also shown that the sheath dynamics and ion energy distribution are affected significantly by this time-varying ion current.

• OSTI ID: 20636952
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 1 Vol. 23; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COLLISIONS
ENERGY SPECTRA
FLOW MODELS
HIGH-FREQUENCY DISCHARGES
IONS
ONE-DIMENSIONAL CALCULATIONS
PLASMA
PLASMA SHEATH