Collisional ion dynamics in capacitively coupled rf discharges
- Institute for Fusion Studies, University of Texas, Austin, Texas 78712 (United States)
Based on a one-dimensional fluid model, the collision-dominated ion dynamics in capacitively coupled rf discharges are studied theoretically as well as numerically in the low rf frequency regime {omega}{<=}V{sub B}/l (here {omega} is the rf frequency, V{sub B} is the Bohm velocity, and l is the plasma length). It is found that the ion current entering the sheath varies with time as we have shown in the collisionless sheath [N. Xiang and F. L. Waelbroeck, J. Appl. Phys. 93, 5034 (2003)]. The mechanisms for the ion current modulation in the collision-dominated and collisionless sheaths, however, are different. It is also shown that the sheath dynamics and ion energy distribution are affected significantly by this time-varying ion current.
- OSTI ID:
- 20636952
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 1 Vol. 23; ISSN 0734-2101; ISSN JVTAD6
- Country of Publication:
- United States
- Language:
- English
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