The Bohm criterion for rf discharges
Journal Article
·
· Physics of Fluids B; (USA)
- FOM-Instituut voor Plasmafysica Rijnhuizen,'' P.O. Box 1207, 3430 BE Nieuwegein, The Netherlands (NL)
The well-known dc Bohm criterion is extended to rf discharges. Both low- ({omega}{sub rf}{much lt}{omega}{sub {ital pi}}) and high-({omega}{sub {ital pi}} {much lt} {omega}{sub rf}) frequency regimes are considered. For low frequencies, the dc Bohm criterion holds. This criterion states that the initial energy of the ions entering the sheath must exceed a limit in order to obtain a stable sheath. For high frequencies, a modified limit is derived, which is somewhat lower than that of the dc Bohm criterion. The resulting ion current density in a high-frequency sheath is only a few percent lower than that for the dc case.
- OSTI ID:
- 5656027
- Journal Information:
- Physics of Fluids B; (USA), Journal Name: Physics of Fluids B; (USA) Vol. 3:8; ISSN 0899-8221; ISSN PFBPE
- Country of Publication:
- United States
- Language:
- English
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