Dynamics of a collisional, capacitive RF sheath
A self-consistent solution for the dynamics of a high-voltage, capacitive RF sheath driven by a sinusoidal current source is obtained, under the assumptions of time-independent, collisional ion motion and inertialess electrons. The results are that the ion current density is 1.68epsilon/sub o/(2e/M)/sup 1/2/V-bar/sup 3/2/lambda/sub i//sup 1/2//s/sup 5/2//sub m/, where V-bar is the dc self-bias voltage, lambda/sub i/ is the ion mean free path, s/sub m/ is the sheath thickness, e/M is the ion charge-to-mass ratio, and epsilon/sub o/ is the free-space permittivity, the sheath capacitance per unit area for the fundamental voltage harmonic is 1.52epsilon/sub o//s/sub m/, the ratio of the dc to the peak value of the oscillating voltage is 0.40, the second and third voltage harmonics are, respectively, 19.3 and 5.3 percent of the fundamental, and the conductance per unit area for stochastic heating by the oscillating sheath is 2.17(e/sup 2/n/sub o//m..mu../sub e/)lambda/sup 2/3//sub D//lambda/sub i/s/sub m//sup 1/3/, where n/sub o/ is the ion density and lambda/sub D/ is the Debye length at the plasma-sheath edge, and ..mu../sub e/ = (8eT/sub e//..pi..m)/sup 1/2/ is the mean electron speed.
- Research Organization:
- Univ. of California, Berkeley, Berkeley, CA (US)
- OSTI ID:
- 6008039
- Journal Information:
- IEEE Trans. Plasma Sci.; (United States), Journal Name: IEEE Trans. Plasma Sci.; (United States) Vol. 17:2; ISSN ITPSB
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
700101* -- Fusion Energy-- Plasma Research-- Confinement
Heating
& Production
COLLISIONAL PLASMA
CURRENT DENSITY
DEBYE LENGTH
DIMENSIONS
DYNAMICS
ELECTRONS
ELEMENTARY PARTICLES
FERMIONS
HARMONICS
ION DRIFT
LENGTH
LEPTONS
MECHANICS
OSCILLATIONS
PLASMA
PLASMA SHEATH
RF SYSTEMS
STOCHASTIC PROCESSES
TIME DEPENDENCE