Fabrication of dry etched and subsequently passivated laser facets in GaAs/AlGaAs
Journal Article
·
· Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- University of Ulm, Ulm, Germany and Swiss Federal Institute of Technology, Lausanne (Switzerland)
The aging behavior of edge emitting laser diodes based on GaAs/AlGaAs is investigated by comparing devices with facets that are alternatively cleaved or dry etched and consecutively treated with H{sub 2}S. In this work we demonstrate that an in situ exposure to H{sub 2}S gas is not sufficient to prevent ageing but an additional plasma treatment is rather required to obtain comparable ageing results to lasers with cleaved facets.
- OSTI ID:
- 20636587
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 5 Vol. 22; ISSN 0734-2101; ISSN JVTAD6
- Country of Publication:
- United States
- Language:
- English
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