Coating The Inner Walls Of Tubes With TiN Films By Reactive Sputtering

Journal Article · Tue Aug 26 04:00:00 EDT 2003 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.1619839· OSTI ID:20634226

Kraus, T; Lindner, J K.N.; Stritzker, B ^[1]; Keckes, J ^[2]; Ensinger, W ^[3]

---

1. University of Augsburg, Institute of Physics, 86135 Augsburg (Germany)
2. Austrian Academy of Sciences, Erich Schmid Institute for Materials Science, 8700 Leoben (Austria)
3. Philipps University Marburg, 35032 Marburg (Germany)

It is possible to achieve a homogenous coating of the inner walls of tubes by sputter deposition. For this purpose a conical sputter target is moved through the tube parallel to its axis while an ion beam enters the tube along its axis, impinges onto the target and sputters material onto the tube inner wall. But so far only monatomic coatings were performed with this technique. To improve the mechanical properties of tubes TiN films were deposited by reactive sputtering. Therefore a Ti sputter target is used, the N2 reactive gas is delivered into the tube by a nozzle. The topography of the films is dominated by a ripple structure with the wave vector perpendicular to the tubes length axis. The development of the ripples is discussed in terms of scattered Ar projectiles which impinge onto the substrate as well as the deposited film under grazing incidence angles. Results of RBS, ERD, AFM, and hardness measurements are shown.

• OSTI ID: 20634226
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 680; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMIC FORCE MICROSCOPY
INCIDENCE ANGLE
ION BEAMS
NOZZLES
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SPUTTERING
SUBSTRATES
SURFACE COATING
THIN FILMS
TITANIUM NITRIDES
TUBES