Micropipes in silicon carbide crystals: Do all screw dislocations have open cores?

Journal Article · Tue Aug 01 04:00:00 EDT 2000 · Journal of Materials Research

DOI:https://doi.org/10.1557/JMR.2000.0236· OSTI ID:20217679

Vetter, William M ^[1]; Dudley, Michael ^[1]

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1. Department of Materials Science and Engineering, State University of New York at Stony Brook, Stony Brook, New York 11794-2275 (United States)

Micropipes in a 6H-SiC semiconductor wafer were studied by scanning electron and atomic force microscopy. The screw dislocations intersecting the wafer's surface were located by etch pitting, and their Burgers vectors determined by x-ray topography. The etch pits were eroded into smooth craters by ion beam etching to expose levels of dislocation line from inside the sample's bulk. There a micropipe's diameter is distant from surface relaxation effects. Hollow cores (micropipes) were observed at the base of the craters whose screw dislocations had Burgers vectors of magnitude three multiples of the c-lattice parameter and higher. Screw dislocations with 1c and 2c Burgers vectors had no associated micropipes. (c) 2000 Materials Research Society.

• OSTI ID: 20217679
• Journal Information: Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 8 Vol. 15; ISSN JMREEE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BURGERS VECTOR
CRYSTAL GROWTH
ETCHING
EXPERIMENTAL DATA
SCREW DISLOCATIONS
SILICON CARBIDES