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Growth and characterization of piezoelectrically enhanced acceptor-type AlGaN/GaN heterostructures

Conference ·
OSTI ID:20104596
Acceptor (Mg)-doped AlGaN/GaN heterostructures were grown via MOVPE and compared to similarly doped GaN standard films grown in the same reactor. Chemical analysis of the films, via secondary ion mass spectrometry (SIMS), revealed comparable Mg concentrations of {approximately}2x10{sup 19} atoms/cm{sup 3} in all films. The Mg-doped GaN standard sample had a sheet conductance of 7-{micro}S compared to a sheet conductance of 20-{micro}S for an AlGaN/GaN heterostructure. The sheet conductance of the AlGaN/GaN heterostructures was higher due to piezoelectric acceptor doping and modulation doping effects in addition to conventional Mg acceptor doping.
Research Organization:
North Carolina State Univ., Raleigh, NC (US)
OSTI ID:
20104596
Country of Publication:
United States
Language:
English