In-situ single chamber arc sputtering process for YCd{sub 0.3}Ba{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} superconducting thin films
Journal Article
·
· Journal of Low Temperature Physics
Superconducting YCd{sub 0.3}Ba{sub 2}Cu{sub 3}O{sub 7.{delta}} thin films have been deposited in-situ onto single crystal MgO substrates using a DC arc-sputtering process. The depositions were carried out in a single chamber deposition system equipped with two target holders. The films deposited at the optimum condition exhibited strong (001) orientation with a high peak intensity. The best electrical properties were achieved to be 90K for {Tc}, 81K for T{sub zero} and the transport critical current density J{sub c} = 675 A/cm{sup 2} at 77K and 2.3 x 10{sup 3} A/cm{sup 2} at 4.2K for the sample deposited at the optimum conditions.
- Research Organization:
- Inonu Univ., Bolumu, (TR)
- OSTI ID:
- 20012854
- Journal Information:
- Journal of Low Temperature Physics, Journal Name: Journal of Low Temperature Physics Journal Issue: 3-4 Vol. 117; ISSN 0022-2291; ISSN JLTPAC
- Country of Publication:
- United States
- Language:
- English
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