Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors

Conference · Mon Sep 17 04:00:00 EDT 2018 · Advances in X-Ray/EUV Optics and Components XIII

DOI:https://doi.org/10.1117/12.2321642· OSTI ID:1963415

Chao, Weilun; Wojdyla, Antoine; Bryant, Diane; Goldberg, Kenneth A.; Assoufid, Lahsen; Cocco, Daniele; Idir, Mourad

We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their performance, comparing grating-based lateral shearing interferometry and Hartmann wavefront sensing. We created a compact shearing interferometer concept with a dense array of binary amplitude gratings in a single membrane to support one-dimensional wavefront measurements across a wide wavelength range without the need for longitudinal position adjustment. We find that a common scaling parameter based on wavelength and the distance to the measurement plane guides the design of both systems toward optimal sensitivity. We show preliminary results from recent experiments demonstrating one and two-dimensional wavefront sensing below the Marechal criterion.

• Research Organization: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
• DOE Contract Number: AC02-05CH11231
• OSTI ID: 1963415
• Conference Information: Journal Name: Advances in X-Ray/EUV Optics and Components XIII
• Country of Publication: United States
• Language: English